Electronic gases generally refer to the various gases used in semiconductor processes, which have wide applications in the microelectronics industry. These gases play a crucial role in the production of electronic products such as integrated circuits, display panels, and solar cells.

Integrated Circuit Manufacturing: In the manufacturing process of integrated circuits (ICs), electronic gases are used in various critical process steps. For example, gases such as silane (SiH4) and phosphine (PH3) are often used in the doping process to modify the electrical properties of silicon crystals. Various halide gases, such as boron trichloride (BCl3) and sulfur hexafluoride (SF6), are used in etching and cleaning steps to help precisely control the formation of circuit patterns.

Display Panel Production: Electronic gases also play an important role in the production of liquid crystal display panels (LCDs) and organic light-emitting diodes (OLEDs). For example, nitrogen (N2) and oxygen (O2) are often used to control the atmosphere in the thin film deposition process to ensure high-quality thin film materials. Certain gases, such as ammonia (NH3) and methane (CH4), are also used in specific chemical vapor deposition processes.

Solar Cell Manufacturing: Electronic gases also have wide applications in the manufacturing process of solar cells. For example, silane gas is used for surface passivation of silicon-based solar cells to improve the photoelectric conversion efficiency. Certain gases are also used in the manufacture of thin-film solar cells, such as copper indium gallium selenide (CIGS) solar cells.

Besides the applications mentioned above, electronic gases have wide applications in other fields, such as sensor manufacturing and optoelectronic device manufacturing. With the continuous development of technology, the application areas of electronic gases will continue to expand.