Rated Input Voltage: Three-phase, AC 3×380~480V ±10% + PE, 50/60Hz

Output Voltage: DC 0~800V adjustable

Output Current: DC 0~85A adjustable (pulse)

Cooling Method: Water cooling

Power Supply Type: Medium frequency (MF) inverter power supply

Application Industries: Widely used in solar photovoltaic manufacturing, semiconductor process equipment, integrated circuit fabrication, LED production, thin-film deposition, induction heating, plasma research and cleaning, medical disinfection and physiotherapy, and other related high-tech fields.

Medium frequency(MF) rectifier power supply is a static frequency conversion device that transforms three-phase mains power into single-phase output. It is widely used in the solar photovoltaic industry, plasma research, integrated circuit process equipment, LED manufacturing, thin-film deposition, induction heating, medical disinfection and physiotherapy, plasma cleaning, and related fields.

Liyuan Haina’s  medium frequency rectifier power supply units are extensively applied in solar cell manufacturing and vacuum coating processes, particularly as specialized power sources for Plasma Enhanced Chemical Vapor Deposition (PECVD) processes. Output configurations include single-channel and dual-channel options, with each channel delivering 15kW to 60kW of power. The system supports multiple output waveforms including square wave, stepped wave, and bipolar pulse wave, accommodating diverse coating process requirements.

The  medium frequency rectifier power supply operates on an “AC → DC → AC” conversion principle: a three-phase bridge fully-controlled rectifier circuit converts mains AC to DC, which is smoothed by a smoothing reactor, then fed into a single-phase inverter bridge that converts the DC into single-phase medium-frequency current with an adjustable frequency range of 5kHz to 50kHz.

The load consists of an induction coil and compensation capacitors forming a resonant circuit.  medium frequency rectifier power supply units using IGBT switching devices typically employ series resonant topology to achieve lower switching losses and higher conversion efficiency. Parallel resonant solutions are also available for specific process requirements.

› Photovoltaic Industry: Solar cell manufacturing (PECVD coating processes, TCO transparent conductive film preparation) with  medium frequency rectifier power supply systems

› Optical Coating: Anti-reflective/reflective coatings for lenses and precision optical components

› Semiconductor Industry: Integrated circuit process equipment, LED manufacturing, thin-film growth

› Consumer Electronics: Surface treatment for mobile phones, chips, and electronic components

› Automotive Industry: Surface treatment for automotive parts and components

› Metalworking: Hard coating deposition for cutting tools and molds

› Decorative Industry: Surface coating for high-end decorative items, sanitary ware, tableware, and lighting fixtures

› Aerospace: Coating treatment for aircraft engine components

› Research and Medical: Plasma research, plasma cleaning, equipment disinfection and physiotherapy

› Induction Heating: Heat treatment for metal materials

Product Features

› Fully digital control system delivering high precision and strong anti-interference capability
› High power conversion efficiency that effectively reduces operational energy consumption of the medium frequency rectifier power supply
› High input power factor with low harmonic current content
› Ultra-low arc energy with fast arc quenching and output recovery capability
› Adjustable multiple output waveforms (square wave, stepped wave, bipolar pulse wave) to suit different processes
› Flexible adaptation to various process requirements through output signal adjustments
› Supports both single-channel and dual-channel configurations

Selection Guide

When selecting a  medium frequency rectifier power supply, the following factors should be taken into consideration:

› Power Requirements: Determine single-channel or multi-channel power level (15kW~60kW) based on the coating process

› Output Waveform: Choose square wave, stepped wave, or bipolar pulse wave according to process specifications

› Cooling Method: Select water-cooled or air-cooled solutions based on site conditions

› Communication Interface: Standard RS485 with optional CAN and Ethernet, compatible with Modbus and Profibus protocols for seamless integration with PLC systems and factory automation networks

Liyuan Haina’s  medium frequency rectifier power supply units are currently in production at major photovoltaic and vacuum coating manufacturers across China, supporting critical processes including PECVD and TCO deposition. Our technical team provides end-to-end support—from initial evaluation and load matching through to on-site commissioning—to ensure each  medium frequency rectifier power supply operates at peak efficiency in your specific production environment.

Give us your coating material, chamber size, target film thickness, and deposition rate. Our engineers do the load matching and recommend a  medium frequency rectifier power supply that fits your process.

Frequently Asked Questions

Q1: What makes a  medium frequency rectifier power supply different from a radio frequency power supply?

Medium frequency (5kHz~50kHz) goes into PECVD coating and magnetron sputtering. Radio frequency (MHz) goes into plasma etching and dielectric film deposition. The difference comes down to what your process needs—and a  medium frequency rectifier power supply is the right choice for the former.

Q2: Why does arc quenching speed matter in  medium frequency rectifier power supply units?

Arcing can occur on the target surface during the sputtering process. If the arc is not extinguished quickly, it can damage the substrate and result in product rejection. Liyuan Haina  medium frequency rectifier power supply units achieve arc response times under 100ns with residual energy below 0.4mJ/kW, providing effective substrate protection.

Q3: What are the advantages of a dual-channel configuration in a  medium frequency rectifier power supply?

A dual-channel  medium frequency rectifier power supply drives two sputtering targets from a single unit, with the two targets firing alternately. This arrangement reduces arc discharge and target surface poisoning, making it particularly effective for reactive coating processes.

Q4: How do I select the right  medium frequency rectifier power supply for my process?

Selection depends on your specific process parameters—coating material, chamber dimensions, target film thickness, and deposition rate. Contact our engineering team with these specifications, and we will perform load matching and waveform selection to identify the most suitable  medium frequency rectifier power supply configuration for your system.

If you need​ a photovoltaic power supply with different​ specifications, we can customize the design to meet your exact requirements. Please contact us for more details.

Looking for factory-direct pricing on a medium frequency (MF) power supply HMDSB-2×50A/600V? Liyuan Haina Rectifier is a professional manufacturer and supplier in this field. With over 27 years of experience in R&D, design, production, sales, and technical services for industrial rectifiers, we have exported our products to the United States, Canada, the UK, Italy, Spain, South Africa, Russia, the UAE, Japan, South Korea, Malaysia, and many other countries. Our well-equipped factory enables us to offer high-quality, Made-in-China products at competitive prices, along with flexible customization services. We warmly welcome your inquiries.

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